Sales of MEMS equipment should match the 17% average annual growth of the MEMS device market through 2012, while the materials market maintains a steady 12% growth rate, according to the Global MEMS/Microsystems Markets and Opportunities 2008 report.

For 2008, MEMS unit production will jump 25% to 2.5 billion units, supporting 11% growth in the MEMS materials market, and a 3% increase in overall MEMS equipment, with healthier 9%-12% growth in key sectors like etching and bonding tools.
MEMS devices for high volume consumer applications --like silicon microphones, micro displays, RF MEMS and even microfluidics for biomedical applications - will ramp production at an accelerating rate over the next five years. By 2012, MEMS makers will be shipping 8.1 billion units a year, worth some $15.5 billion - and nearly half that market will be consumer devices.
Demand for MEMS equipment will accordingly accelerate sharply, with double digit growth from 2010, while consumer-market price pressures hold materials sales to a fairly steady ~12% growth rate, despite the higher volumes.

EXECUTIVE SUMMARY 1

Application Trends 2
Major Recent Application Developments 3

1. INTRODUCTION 3

2. MEMS MARKET OVERVIEW 4

2.1 MEMS Demand to Accelerate, Average 17% Growth 2007 - 2012 4
2.2 Growth Comes from Consumer Applications 4
2.3 Consumer Markets Drive Growth at Top 30 MEMS Manufacturers 6

3. OVERVIEW OF MEMS PROCESS TECHNOLOGIES 7

4. MEMS APPLICATIONS: TRENDS AND OPPORTUNITIES 7

4.1 Ink Jet Heads 7
4.2 Pressure Sensors 8
4.3 Silicon Microphones 9
4.4 Accelerometers 10
4.5 Gyroscopes 12
4.6 MOEMS, Micro Bolometers and Micro Displays 13
4.7 Microfluidics 15
4.8 RF MEMS Devices: Filters, Switches and Oscillators 17
4.9 Micro Tips 19
4.10 Emerging MEMS 19

5. EQUIPMENT AND MATERIALS FOR MEMS:TRENDS AND OPPORTUNITIES 20

5.1 Overview 20
5.2 Etching 21
5.3 Deposition 23
5.4 Lithography 23
5.5 Wafer Bonding 25
5.6 Wafer Cleaning 26
5.7 Wafer Thinning and Planarization 27
5.8 Metrology 30
5.9 Packaging 30
5.10 Test 30
5.11 Materials 30

6. APPENDICES 33

List of Figures

Figure A MEMS Market Annual Growth (US$ Millions) 1
Figure B The MEMS Supply Chain 2
Figure C MEMS Equipment to Average 17% Growth Driven by New Applications (US$ Millions) 2
Figure D MEMS Materials Forecast (US$ Millions) 3
Figure 2.1 MEMS Units Forecast (Million Units) 5
Figure 2.2 MEMS Market Forecast by Application 6
Figure 2.3 Top 30 MEMS Manufacturers by 2007 Revenue 6
Figure 3.1 Bulk Micromachining Makes Thick Structures 7
Figure 3.2 Sacrificial Etching Makes Thinner Structures 7
Figure 4.1 Ink Jet Heads (US$ Millions) 7
Figure 4.2 MEMS Inkjet Print Head - Market and Volumes 2007 - 2012 8
Figure 4.3 Inkjet Printhead Market Share - 2007 8
Figure 4.4 TPMS Market (US$ Millions) 9
Figure 4.5 Pressure Sensor Market Share 9
Figure 4.6 Schematic of Single Axis Gyroscope Structure 12
Figure 4.7 Commercial Micro Bolometer Applications 14
Figure 4.8 Wafer Level Packaging 15
Figure 4.9 Market Size Impacted by WLP (US$ Millions) 15
Figure 5.1 MEMS Equipment Sales Forecast 21
Figure 5.2 Release Etching Process Market Share Overview 21
Figure 5.3 Dual Side Stepper: CD and Overlay Requirements Roadmap 24
Figure 5.4 Wafer Bonding: Bonding Technology vs. Applications 25
Figure 5.5 Wafer Bonding:Technology Types 27
Figure 5.6 Wafer Cleaning in MEMS 28
Figure 5.7 Global CMP Market Share (2.9 Billion US$) 29
Figure 5.8 Ball Bonder Market Share (574 Million US$) 30
Figure 5.9 Si Wafers Unit Forecast for MEMS (6-Inch Equivalent) 31
Figure 5.10 MEMS Si Wafers Market Forecast 31
Figure 5.11 SOI Wafers Unit Forecast for MEMS (6-Inch Equivalent) 31
Figure 5.12 MEMS SOI Wafers Market Forecast 32
Figure 5.13 Glass Wafers Unit Forecast for WLC MEMS 32
Figure 5.14 WLC MEMS Glass Wafers Market Forecast 32
Figure 5.15 MEMS Photomask Market Forecast 32
Figure 5.16 MEMS Chemicals Market Forecast 32