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PUBLISHER: Global Industry Analysts, Inc. | PRODUCT CODE: 1747702

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PUBLISHER: Global Industry Analysts, Inc. | PRODUCT CODE: 1747702

Dry Etching Equipment

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Table of Contents

Global Dry Etching Equipment Market to Reach US$15.6 Billion by 2030

The global market for Dry Etching Equipment estimated at US$11.1 Billion in the year 2024, is expected to reach US$15.6 Billion by 2030, growing at a CAGR of 5.8% over the analysis period 2024-2030. Inductively Coupled Plasma Equipment, one of the segments analyzed in the report, is expected to record a 5.4% CAGR and reach US$6.0 Billion by the end of the analysis period. Growth in the Capacitive Coupled Plasma Equipment segment is estimated at 7.1% CAGR over the analysis period.

The U.S. Market is Estimated at US$2.9 Billion While China is Forecast to Grow at 5.7% CAGR

The Dry Etching Equipment market in the U.S. is estimated at US$2.9 Billion in the year 2024. China, the world's second largest economy, is forecast to reach a projected market size of US$2.5 Billion by the year 2030 trailing a CAGR of 5.7% over the analysis period 2024-2030. Among the other noteworthy geographic markets are Japan and Canada, each forecast to grow at a CAGR of 5.4% and 5.0% respectively over the analysis period. Within Europe, Germany is forecast to grow at approximately 4.7% CAGR.

Global Dry Etching Equipment Market - Key Trends & Drivers Summarized

Why Is Dry Etching Equipment Pivotal in Advanced Semiconductor Manufacturing?

Dry etching equipment plays a critical role in semiconductor fabrication, enabling the precise removal of material layers from silicon wafers using plasma or reactive gases, rather than the wet chemicals used in traditional etching processes. As chip architectures grow increasingly complex and miniaturized-pushing toward nodes below 5nm-dry etching becomes essential for achieving the high-resolution patterning, anisotropic profiles, and atomic-level accuracy required for advanced device performance. This equipment is indispensable for processes such as gate etching, contact hole formation, and hard mask patterning in the production of DRAM, NAND flash, and logic chips. Unlike wet etching, which lacks directional control, dry etching enables highly controlled, vertical etch profiles crucial for fabricating multi-layered, three-dimensional structures like FinFETs and 3D NAND. With the growing adoption of EUV lithography and the move toward heterogeneous integration, demand for dry etching systems is surging across foundries and integrated device manufacturers (IDMs). Furthermore, as electronics power everything from smartphones and servers to electric vehicles and quantum computers, dry etching equipment forms the technological backbone of progress in computing power, data storage, and energy efficiency. Without it, the semiconductor industry would be unable to meet the geometric scaling and performance requirements of next-generation electronics.

How Are Technological Innovations Enhancing the Capabilities of Dry Etching Equipment?

Technological advancements are transforming dry etching equipment into highly sophisticated tools capable of atomic-scale precision and integration with automated fabrication workflows. Plasma-enhanced etching systems, which use reactive ion etching (RIE) or inductively coupled plasma (ICP), are now being developed with high-density plasma sources, advanced gas distribution systems, and multiple bias controls to allow finer tuning of etch rates, selectivity, and uniformity across large wafer sizes. Atomic Layer Etching (ALE), a next-generation dry etching technique, is gaining momentum for enabling ultra-thin material removal one atomic layer at a time, which is essential for patterning high-aspect-ratio features and minimizing surface damage. In addition, artificial intelligence and machine learning are being integrated into etching systems to provide real-time process monitoring, predictive maintenance, and autonomous parameter adjustments. Equipment manufacturers are also enhancing vacuum chamber design, temperature control, and residue management to improve yield and tool uptime. The introduction of hybrid etch-deposition systems allows simultaneous etching and passivation, enhancing profile control and reducing process steps. These innovations are not only pushing the boundaries of semiconductor scalability but also improving process reliability, throughput, and total cost of ownership-making advanced dry etching equipment an enabler of both technical progress and manufacturing efficiency in the semiconductor sector.

Why Do Application-Specific Demands and Regional Trends Shape Dry Etching Equipment Usage?

The usage and specification of dry etching equipment vary significantly by application type-such as logic chips, memory devices, image sensors, and power semiconductors-as well as by regional industry dynamics. Logic devices at advanced nodes require highly selective, damage-free etching to preserve nanoscale features and maintain transistor performance, while memory devices like NAND and DRAM demand deep, high-aspect-ratio etching for dense vertical structures. Compound semiconductors such as GaN and SiC, used in RF and power devices, present unique material challenges requiring specialized etching chemistries and hardware configurations. Geographically, Asia-Pacific leads the global dry etching equipment market, with Taiwan, South Korea, China, and Japan hosting the world’s largest semiconductor fabs and contributing the majority of capital equipment spending. In particular, Taiwan’s TSMC and South Korea’s Samsung are heavily investing in advanced etch tools to support their aggressive scaling roadmaps. In North America, companies like Intel and GlobalFoundries are expanding capacity in response to supply chain security initiatives and chip act legislation, which is boosting domestic equipment demand. Europe focuses on automotive-grade semiconductors and specialty applications, contributing to demand for etching tools tailored to power electronics and MEMS. These regional variations, combined with the diversity of chip technologies, make flexibility, customization, and localized service support essential factors for success in the dry etching equipment industry.

What Are the Key Drivers Fueling Growth in the Global Dry Etching Equipment Market?

The growth in the dry etching equipment market is being propelled by a convergence of semiconductor innovation, expanding device complexity, and escalating global demand for electronics across industries. One of the most significant growth drivers is the continual push for smaller, faster, and more energy-efficient chips, which require ever more precise pattern transfer technologies achievable only through advanced dry etching. The rise of 5G networks, AI computing, cloud data centers, autonomous vehicles, and the Internet of Things (IoT) is accelerating the need for high-performance semiconductors, thereby increasing investment in front-end fabrication equipment. Additionally, the shift from planar to 3D architectures-like FinFETs and Gate-All-Around (GAA) transistors-has elevated the complexity of etch steps, leading to higher demand for multi-function etching platforms. Government-backed initiatives such as the U.S. CHIPS Act and Europe’s IPCEI (Important Projects of Common European Interest) are also driving semiconductor sovereignty and spurring domestic investments in fabs and tooling. Moreover, global supply chain disruptions have prompted chipmakers to diversify production and invest in more geographically distributed capacity, expanding the customer base for etching equipment providers. Environmental considerations are influencing equipment design as well, with energy efficiency and process gas recycling becoming important differentiators. With strong capital expenditure cycles and technological momentum, the dry etching equipment market is set to grow in tandem with the semiconductor industry’s march toward next-generation computing and connectivity.

SCOPE OF STUDY:

The report analyzes the Dry Etching Equipment market in terms of units by the following Segments, and Geographic Regions/Countries:

Segments:

Type (Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching, Other Types); Application (Logic & Memory, MEMS, Power Device, Other Applications)

Geographic Regions/Countries:

World; United States; Canada; Japan; China; Europe (France; Germany; Italy; United Kingdom; and Rest of Europe); Asia-Pacific; Rest of World.

Select Competitors (Total 32 Featured) -

  • Advanced Micro-Fabrication Equipment Inc.
  • Applied Materials, Inc.
  • DISCO Corporation
  • EV Group (EVG)
  • GigaLane Co., Ltd.
  • Hitachi High-Technologies Corporation
  • Lam Research Corporation
  • Mattson Technology, Inc.
  • Meyer Burger Technology AG
  • NAURA Technology Group Co., Ltd.
  • Oxford Instruments plc
  • Panasonic Corporation
  • Plasma-Therm LLC
  • Samco Inc.
  • SPTS Technologies Ltd.
  • SUSS MicroTec SE
  • Suzhou Delphi Laser Co., Ltd.
  • Tokyo Electron Limited
  • ULVAC Technologies, Inc.
  • Veeco Instruments Inc.

TARIFF IMPACT FACTOR

Our new release incorporates impact of tariffs on geographical markets as we predict a shift in competitiveness of companies based on HQ country, manufacturing base, exports and imports (finished goods and OEM). This intricate and multifaceted market reality will impact competitors by artificially increasing the COGS, reducing profitability, reconfiguring supply chains, amongst other micro and macro market dynamics.

We are diligently following expert opinions of leading Chief Economists (14,949), Think Tanks (62), Trade & Industry bodies (171) worldwide, as they assess impact and address new market realities for their ecosystems. Experts and economists from every major country are tracked for their opinions on tariffs and how they will impact their countries.

We expect this chaos to play out over the next 2-3 months and a new world order is established with more clarity. We are tracking these developments on a real time basis.

As we release this report, U.S. Trade Representatives are pushing their counterparts in 183 countries for an early closure to bilateral tariff negotiations. Most of the major trading partners also have initiated trade agreements with other key trading nations, outside of those in the works with the United States. We are tracking such secondary fallouts as supply chains shift.

To our valued clients, we say, we have your back. We will present a simplified market reassessment by incorporating these changes!

APRIL 2025: NEGOTIATION PHASE

Our April release addresses the impact of tariffs on the overall global market and presents market adjustments by geography. Our trajectories are based on historic data and evolving market impacting factors.

JULY 2025 FINAL TARIFF RESET

Complimentary Update: Our clients will also receive a complimentary update in July after a final reset is announced between nations. The final updated version incorporates clearly defined Tariff Impact Analyses.

Reciprocal and Bilateral Trade & Tariff Impact Analyses:

USA <> CHINA <> MEXICO <> CANADA <> EU <> JAPAN <> INDIA <> 176 OTHER COUNTRIES.

Leading Economists - Our knowledge base tracks 14,949 economists including a select group of most influential Chief Economists of nations, think tanks, trade and industry bodies, big enterprises, and domain experts who are sharing views on the fallout of this unprecedented paradigm shift in the global econometric landscape. Most of our 16,491+ reports have incorporated this two-stage release schedule based on milestones.

COMPLIMENTARY PREVIEW

Contact your sales agent to request an online 300+ page complimentary preview of this research project. Our preview will present full stack sources, and validated domain expert data transcripts. Deep dive into our interactive data-driven online platform.

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Product Code: MCP34965

TABLE OF CONTENTS

I. METHODOLOGY

II. EXECUTIVE SUMMARY

  • 1. MARKET OVERVIEW
    • Influencer Market Insights
    • World Market Trajectories
    • Tariff Impact on Global Supply Chain Patterns
    • Dry Etching Equipment - Global Key Competitors Percentage Market Share in 2025 (E)
    • Competitive Market Presence - Strong/Active/Niche/Trivial for Players Worldwide in 2025 (E)
  • 2. FOCUS ON SELECT PLAYERS
  • 3. MARKET TRENDS & DRIVERS
    • Miniaturization of Semiconductor Nodes Throws the Spotlight on Advanced Dry Etching Systems
    • Here's How 3D NAND and FinFET Architectures Propel Demand for High-Precision Etching Equipment
    • Rising Demand for Logic and Memory Chips Accelerates Investment in Etch Technology Capabilities
    • Transition to EUV Lithography Strengthens Business Case for Atomic-Level Etch Control
    • Growth in Foundry and Fabless Chip Models Expands Adoption of Modular Etch Platforms
    • Emerging Compound Semiconductors Spur Innovation in Material-Specific Etch Techniques
    • Advanced Packaging and Heterogeneous Integration Generate Demand for Deep Etch Accuracy
    • Here's the Story: IoT and AI Chip Proliferation Drives High-Volume Dry Etch Equipment Sales
    • Push for Smaller Gate Widths Increases Use of Plasma and Reactive Ion Etch Solutions
    • Automotive Semiconductor Reliability Standards Propel Demand for Precision Etch Repeatability
    • Sustainability Goals in Fab Operations Fuel Innovation in Low-Waste Etch Chemistries
    • Integration of AI and Process Control Systems Enhances Yield Optimization in Dry Etching
  • 4. GLOBAL MARKET PERSPECTIVE
    • TABLE 1: World Dry Etching Equipment Market Analysis of Annual Sales in US$ Million for Years 2015 through 2030
    • TABLE 2: World Recent Past, Current & Future Analysis for Dry Etching Equipment by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 3: World Historic Review for Dry Etching Equipment by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 4: World 15-Year Perspective for Dry Etching Equipment by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets for Years 2015, 2025 & 2030
    • TABLE 5: World Recent Past, Current & Future Analysis for Inductively Coupled Plasma by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 6: World Historic Review for Inductively Coupled Plasma by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 7: World 15-Year Perspective for Inductively Coupled Plasma by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 8: World Recent Past, Current & Future Analysis for Capacitive Coupled Plasma by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 9: World Historic Review for Capacitive Coupled Plasma by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 10: World 15-Year Perspective for Capacitive Coupled Plasma by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 11: World Recent Past, Current & Future Analysis for Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 12: World Historic Review for Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 13: World 15-Year Perspective for Reactive Ion Etching by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 14: World Recent Past, Current & Future Analysis for Deep Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 15: World Historic Review for Deep Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 16: World 15-Year Perspective for Deep Reactive Ion Etching by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 17: World Recent Past, Current & Future Analysis for Other Types by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 18: World Historic Review for Other Types by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 19: World 15-Year Perspective for Other Types by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 20: World Recent Past, Current & Future Analysis for Logic & Memory by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 21: World Historic Review for Logic & Memory by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 22: World 15-Year Perspective for Logic & Memory by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 23: World Recent Past, Current & Future Analysis for MEMS by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 24: World Historic Review for MEMS by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 25: World 15-Year Perspective for MEMS by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 26: World Recent Past, Current & Future Analysis for Power Device by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 27: World Historic Review for Power Device by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 28: World 15-Year Perspective for Power Device by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
    • TABLE 29: World Recent Past, Current & Future Analysis for Other Applications by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 30: World Historic Review for Other Applications by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 31: World 15-Year Perspective for Other Applications by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030

III. MARKET ANALYSIS

  • UNITED STATES
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in the United States for 2025 (E)
    • TABLE 32: USA Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 33: USA Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 34: USA 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 35: USA Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 36: USA Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 37: USA 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • CANADA
    • TABLE 38: Canada Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 39: Canada Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 40: Canada 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 41: Canada Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 42: Canada Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 43: Canada 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • JAPAN
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Japan for 2025 (E)
    • TABLE 44: Japan Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 45: Japan Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 46: Japan 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 47: Japan Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 48: Japan Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 49: Japan 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • CHINA
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in China for 2025 (E)
    • TABLE 50: China Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 51: China Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 52: China 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 53: China Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 54: China Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 55: China 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • EUROPE
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Europe for 2025 (E)
    • TABLE 56: Europe Recent Past, Current & Future Analysis for Dry Etching Equipment by Geographic Region - France, Germany, Italy, UK and Rest of Europe Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
    • TABLE 57: Europe Historic Review for Dry Etching Equipment by Geographic Region - France, Germany, Italy, UK and Rest of Europe Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 58: Europe 15-Year Perspective for Dry Etching Equipment by Geographic Region - Percentage Breakdown of Value Sales for France, Germany, Italy, UK and Rest of Europe Markets for Years 2015, 2025 & 2030
    • TABLE 59: Europe Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 60: Europe Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 61: Europe 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 62: Europe Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 63: Europe Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 64: Europe 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • FRANCE
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in France for 2025 (E)
    • TABLE 65: France Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 66: France Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 67: France 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 68: France Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 69: France Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 70: France 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • GERMANY
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Germany for 2025 (E)
    • TABLE 71: Germany Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 72: Germany Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 73: Germany 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 74: Germany Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 75: Germany Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 76: Germany 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • ITALY
    • TABLE 77: Italy Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 78: Italy Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 79: Italy 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 80: Italy Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 81: Italy Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 82: Italy 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • UNITED KINGDOM
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in the United Kingdom for 2025 (E)
    • TABLE 83: UK Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 84: UK Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 85: UK 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 86: UK Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 87: UK Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 88: UK 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • REST OF EUROPE
    • TABLE 89: Rest of Europe Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 90: Rest of Europe Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 91: Rest of Europe 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 92: Rest of Europe Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 93: Rest of Europe Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 94: Rest of Europe 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • ASIA-PACIFIC
    • Dry Etching Equipment Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Asia-Pacific for 2025 (E)
    • TABLE 95: Asia-Pacific Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 96: Asia-Pacific Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 97: Asia-Pacific 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 98: Asia-Pacific Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 99: Asia-Pacific Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 100: Asia-Pacific 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030
  • REST OF WORLD
    • TABLE 101: Rest of World Recent Past, Current & Future Analysis for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 102: Rest of World Historic Review for Dry Etching Equipment by Type - Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 103: Rest of World 15-Year Perspective for Dry Etching Equipment by Type - Percentage Breakdown of Value Sales for Inductively Coupled Plasma, Capacitive Coupled Plasma, Reactive Ion Etching, Deep Reactive Ion Etching and Other Types for the Years 2015, 2025 & 2030
    • TABLE 104: Rest of World Recent Past, Current & Future Analysis for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications - Independent Analysis of Annual Sales in US$ Million for the Years 2024 through 2030 and % CAGR
    • TABLE 105: Rest of World Historic Review for Dry Etching Equipment by Application - Logic & Memory, MEMS, Power Device and Other Applications Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
    • TABLE 106: Rest of World 15-Year Perspective for Dry Etching Equipment by Application - Percentage Breakdown of Value Sales for Logic & Memory, MEMS, Power Device and Other Applications for the Years 2015, 2025 & 2030

IV. COMPETITION

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