PUBLISHER: The Business Research Company | PRODUCT CODE: 1852415
PUBLISHER: The Business Research Company | PRODUCT CODE: 1852415
Dry etching equipment is a semiconductor manufacturing tool that removes material from a substrate using plasma or reactive gases instead of liquid chemicals. It enables the creation of fine patterns and complex structures on microchips with high precision while minimizing damage to surrounding areas. This equipment plays a key role in advanced device fabrication, including integrated circuits, by providing controlled, anisotropic etching.
The main types of dry etching equipment include inductively coupled plasma (ICP) etching, capacitively coupled plasma etching, reactive ion etching, deep reactive ion etching, and others. ICP etching is a high-density plasma technique that uses inductive coils to generate plasma, allowing precise, anisotropic, and high-aspect-ratio etching of semiconductor materials. Key components of these systems include etch chambers, gas control systems, power supplies, cooling systems, and software/control systems. The equipment is available in various configurations, such as batch etchers, single-wafer etchers, high-volume production etchers, modular etching systems, and advanced automated etch tools. These systems are widely applied in semiconductor fabrication, micro-electro-mechanical systems (MEMS), LED production, and other areas, serving end users across electronics, automotive, aerospace, healthcare, and more.
Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report's Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.
The swift increase in U.S. tariffs and the ensuing trade tensions in spring 2025 are significantly affecting the machinery sector by increasing costs for steel, hydraulic systems, and precision bearings critical components often imported from tariff-affected regions. Manufacturers of construction, agricultural, and industrial machinery now face squeezed margins, as many long-term contracts prevent immediate price adjustments. The uncertainty has also delayed investment in automation and smart machinery technologies, slowing productivity gains. To adapt, firms are accelerating local supplier development, redesigning products to use alternative materials, and leveraging predictive maintenance to extend equipment lifespans amid higher replacement costs.
The dry etching equipment market research report is one of a series of new reports from The Business Research Company that provides dry etching equipment market statistics, including dry etching equipment industry global market size, regional shares, competitors with a dry etching equipment market share, detailed dry etching equipment market segments, market trends and opportunities, and any further data you may need to thrive in the dry etching equipment industry. This dry etching equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.
The dry etching equipment market size has grown strongly in recent years. It will grow from $11.02 billion in 2024 to $11.94 billion in 2025 at a compound annual growth rate (CAGR) of 8.4%. The growth observed during the historic period was driven by rising demand for compact electronic devices, increased use of semiconductors in consumer electronics, expanding production of integrated circuits, growing investments in foundry facilities, and wider adoption of automation in fabrication processes.
The dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $16.24 billion in 2029 at a compound annual growth rate (CAGR) of 8.0%. The projected growth during the forecast period is driven by the expanding use of 3D NAND and FinFET technologies, rising demand for advanced node chips, increasing need for high-performance computing devices, growing investments in memory chip manufacturing, and higher demand for wearable electronics. Key trends expected include advancements in plasma etching processes, innovations in atomic layer etching systems, R&D investment in sub-5nm etching tools, developments in dry etching for heterogeneous integration, and adoption of AI-powered process control systems.
The growing demand for semiconductor devices is expected to propel the dry etching equipment market in the coming years. Semiconductor devices are electronic components that control electrical current by utilizing the unique properties of semiconductor materials. This demand is largely driven by the rapid expansion of the consumer electronics sector, as devices such as smartphones, laptops, and smart home products rely on advanced chips for enhanced performance and functionality. Dry etching equipment supports semiconductor manufacturing by precisely shaping and patterning microscopic circuits on silicon wafers, enabling higher performance, miniaturization, and improved efficiency in electronic components. For example, according to the Japan Electronics and Information Technology Industries Association, Japan's electronic equipment production reached $5.6 billion (771,457 million yen) in May 2023. The output of consumer electronics increased to $233 million (32,099 million yen), up from $183 million (25,268 million yen) in May 2022. This rising demand for semiconductor devices is therefore driving the growth of the dry etching equipment market.
Leading players in the dry etching equipment market are developing innovative solutions, including plasma etching-based tools, to improve precision, scalability, and efficiency in semiconductor fabrication. Plasma etching equipment uses ionized gases to remove material from substrates, enabling precise and controlled etching of micro-scale patterns and structures. For example, in November 2024, Japan-based Hitachi High-Technologies Corporation launched the DCR Etch System 9060 Series, designed for precise isotropic (horizontal) etching at the atomic layer level. The system employs plasma etching technology to support the fabrication of advanced three-dimensional semiconductor devices, such as 3D-NAND and 3D-DRAM. It offers high-throughput processing and a compact footprint through a unique wafer-cooling mechanism combined with an infrared lamp that rapidly alternates wafer temperatures, allowing atomic-level control of wafer pattern shapes essential for complex 3D architectures. The system is suitable for both R&D and mass production, helping reduce development cycles, lower costs, and boost productivity in semiconductor manufacturing.
In November 2023, U.S.-based plasma processing equipment provider Plasma-Therm LLC acquired Thin Film Equipment SRL for an undisclosed sum. This acquisition enables Plasma-Therm to expand its European footprint as part of its long-term strategic growth plan and significantly broaden its power device offerings by integrating TFE's suite of physical vapor deposition (PVD) tools designed for MEMS, power, RFID, and other semiconductor applications. Thin Film Equipment SRL, headquartered in Italy, specializes in semiconductor and MEMS equipment for dry-etch technologies.
Major players in the dry etching equipment market are Panasonic Corporation, Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, KLA Corporation, Hitachi High-Technologies Corporation, NAURA Technology Group Co. Ltd., DISCO Corporation, Advanced Energy Industries Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc., Oxford Instruments plc, Shibaura Mechatronics Corporation, GigaLane Co. Ltd., Plasma-Therm LLC, Samco Inc., SENTECH Instruments GmbH, Plasma Etch Inc., Nano-Master Inc., PVA TePla AG.
Asia-Pacific was the largest region in the dry etching equipment market in 2024. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in dry etching equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.
The countries covered in the dry etching equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.
The dry etching equipment market consists of revenues earned by entities by providing services such as installation and commissioning services, maintenance and repair services, process development and optimization services, training and technical support services, and upgrade and retrofit services. The market value includes the value of related goods sold by the service provider or included within the service offering. The dry etching equipment market also includes sales of metal etching systems, dielectric etching systems, and hybrid etching systems. Values in this market are 'factory gate' values; that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods
The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).
The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.
Dry Etching Equipment Global Market Report 2025 from The Business Research Company provides strategists, marketers and senior management with the critical information they need to assess the market.
This report focuses on dry etching equipment market which is experiencing strong growth. The report gives a guide to the trends which will be shaping the market over the next ten years and beyond.
Where is the largest and fastest growing market for dry etching equipment ? How does the market relate to the overall economy, demography and other similar markets? What forces will shape the market going forward, including technological disruption, regulatory shifts, and changing consumer preferences? The dry etching equipment market global report from the Business Research Company answers all these questions and many more.
The report covers market characteristics, size and growth, segmentation, regional and country breakdowns, competitive landscape, market shares, trends and strategies for this market. It traces the market's historic and forecast market growth by geography.
The forecasts are made after considering the major factors currently impacting the market. These include the technological advancements such as AI and automation, Russia-Ukraine war, trade tariffs (government-imposed import/export duties), elevated inflation and interest rates.