PUBLISHER: The Business Research Company | PRODUCT CODE: 2149466
PUBLISHER: The Business Research Company | PRODUCT CODE: 2149466
Chemical dry etching equipment is an advanced manufacturing system that selectively removes material from semiconductor wafers, printed circuit boards (PCBs), and other substrates using reactive gases or plasma instead of liquid chemicals. These systems enable precise pattern transfer during microelectronics fabrication. Chemical dry etching equipment produces fine circuit features with high accuracy, excellent uniformity, and minimal substrate damage, supporting the manufacturing of advanced semiconductor and electronic devices.
The primary product types of chemical dry etching equipment include plasma etching systems, reactive ion etching systems, deep reactive ion etching systems, and other product types. Plasma etching systems refer to semiconductor processing equipment that uses chemically reactive plasma to selectively remove material from substrate surfaces, enabling precise pattern formation and surface modification. These systems are available in single-chamber and multi-chamber equipment configurations and process materials such as silicon, compound semiconductors, and other substrate materials. They are offered as manual equipment, semi-automatic equipment, and fully automatic equipment and are utilized by end-use industries including semiconductor, electronics, automotive, aerospace and defense, healthcare, industrial manufacturing, and others.
Tariffs are influencing the chemical dry etching equipment market by increasing the cost of imported semiconductor manufacturing equipment, plasma components, precision control systems, and specialized materials used in etching processes. The impact is strongest across plasma etching, reactive ion etching, and deep reactive ion etching systems, particularly in semiconductor manufacturing hubs such as East Asia, North America, and Europe. Higher equipment and component costs can increase fab expansion expenses and extend procurement timelines for semiconductor and electronics manufacturers. However, tariffs are also encouraging regional equipment production, supplier diversification, localized component manufacturing, and greater investment in domestic semiconductor fabrication ecosystems.
The chemical dry etching equipment market research report is one of a series of new reports from The Business Research Company that provides chemical dry etching equipment market statistics, including chemical dry etching equipment industry global market size, regional shares, competitors with a chemical dry etching equipment market share, detailed chemical dry etching equipment market segments, market trends and opportunities, and any further data you may need to thrive in the chemical dry etching equipment industry. This chemical dry etching equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.
The chemical dry etching equipment market size has grown strongly in recent years. It will grow from $2.22 billion in 2025 to $2.39 billion in 2026 at a compound annual growth rate (CAGR) of 7.6%. The growth in the historic period can be attributed to increasing semiconductor manufacturing capacity, rising demand for advanced electronic devices, growing production of miniaturized semiconductor components, increasing adoption of high-density integrated circuits, and rising demand for precise wafer pattern transfer.
The chemical dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $3.15 billion in 2030 at a compound annual growth rate (CAGR) of 7.2%. The growth in the forecast period can be attributed to increasing demand for advanced semiconductor nodes, rising production of high-performance computing chips, growing demand for compound semiconductor devices, increasing need for finer circuit geometries, and rising investment in semiconductor fabrication facilities. Major trends in the forecast period include increasing adoption of high-precision dry etching processes, rising demand for improved etching uniformity, growing use of selective etching techniques, increasing demand for low-damage substrate processing, and rising adoption of advanced etching process control.
The growth in automotive electronics and electric vehicles is expected to drive the growth of the chemical dry etching equipment market in the coming years. Automotive electronics and electric vehicles refer to electronic systems, components, and electrically powered vehicles that enhance vehicle performance, safety, connectivity, and energy efficiency. The growth in automotive electronics and electric vehicles is driven by increasing demand for advanced safety, connectivity, and energy-efficient technologies, as modern vehicles require sophisticated electronic systems to improve performance, reduce emissions, and enhance the driving experience. Automotive electronics and electric vehicle demand drives the growth of chemical dry etching equipment by enabling the precise fabrication of semiconductor devices, sensors, power electronics, and microelectromechanical systems used in advanced driver assistance systems, battery management systems, electric powertrains, and in-vehicle electronics. For instance, in January 2024, according to a report published by Kelley Blue Book, a US-based Cox Automotive company, a record 1.2 million car buyers in the United States chose electric vehicles in 2023, accounting for 7.6% of the entire U.S. vehicle market, up from 5.9% in 2022. Therefore, the growth in automotive electronics and electric vehicles (EVs) is driving the growth of the chemical dry etching equipment market.
Major companies operating in the chemical dry etching equipment market are focusing on developing advanced plasma etching systems to enhance etching precision, process uniformity, and manufacturing efficiency for advanced semiconductor and display applications. Plasma etching systems use reactive gases and plasma to selectively remove materials from substrates with high precision, enabling the production of fine circuit patterns and display structures. For instance, in August 2023, Tokyo Electron Ltd., a Japan-based semiconductor manufacturing equipment company, launched the Betelex 2700 PICP EX Plus plasma etch module for 8.7th generation flat panel display production. The system incorporates enhanced plasma distribution and temperature control technologies that improve etch uniformity, increase production yield, reduce operating costs, and support high-precision OLED display manufacturing.
In February 2025, Accuron Technologies Limited, a Singapore-based technology investment and engineering company, acquired Trymax Holding B.V. for an undisclosed amount. Through this acquisition, Accuron Technologies aimed to broaden its semiconductor equipment portfolio and strengthen its position in the European semiconductor equipment industry by incorporating Trymax's plasma-based semiconductor manufacturing technologies into its existing portfolio. Trymax Holding B.V. is a Netherlands-based company that provides dry etching equipment, with a specific focus on plasma-based isotropic etching and light or shallow etching applications.
Major companies operating in the chemical dry etching equipment market are Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, Hitachi High-Tech Corporation, Nordson MARCH Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc. China, Oxford Instruments Plasma Technology Limited, Shibaura Mechatronics Corporation, Wonik IPS Co. Ltd., GigaLane Co. Ltd., SENTECH Instruments GmbH, Plasma-Therm LLC, PSK Inc., Samco Inc., SEMES Co. Ltd., Trion Technology Inc., Plasma Etch Inc., Piotech Inc., NAURA Technology Group Co. Ltd.
Asia-Pacific was the dominant region in the chemical dry etching equipment market in 2025. Asia-Pacific is expected to be the rapidly growing region in the forecast period. The regions covered in the chemical dry etching equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa.
The countries covered in the chemical dry etching equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.
The chemical dry etching equipment market consists of sales of turbomolecular vacuum pumps, endpoint detection modules, and wafer handling robots. Values in this market are 'factory gate' values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.
The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).
The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.
Chemical Dry Etching Equipment Market Global Report 2026 from The Business Research Company provides strategists, marketers and senior management with the critical information they need to assess the market.
This report focuses chemical dry etching equipment market which is experiencing strong growth. The report gives a guide to the trends which will be shaping the market over the next ten years and beyond.
Where is the largest and fastest growing market for chemical dry etching equipment ? How does the market relate to the overall economy, demography and other similar markets? What forces will shape the market going forward, including technological disruption, regulatory shifts, and changing consumer preferences? The chemical dry etching equipment market global report from the Business Research Company answers all these questions and many more.
The report covers market characteristics, size and growth, segmentation, regional and country breakdowns, total addressable market (TAM), market attractiveness score (MAS), competitive landscape, market shares, company scoring matrix, trends and strategies for this market. It traces the market's historic and forecast market growth by geography.
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