PUBLISHER: Fortune Business Insights Pvt. Ltd. | PRODUCT CODE: 1887068
PUBLISHER: Fortune Business Insights Pvt. Ltd. | PRODUCT CODE: 1887068
EUV Lithography Market Size, Share, Growth and Global Industry Analysis By Type & Application, Regional Insights and Forecast to 2024-2032
Growth Factors of EUV lithography Market
The global EUV lithography market is entering a phase of rapid technological and commercial expansion as semiconductor manufacturers increasingly shift toward advanced nodes below 7nm. According to 2024 estimates, the global market was valued at USD 11.19 billion. With strong demand from semiconductor foundries, integrated device manufacturers, and advanced consumer electronics, the market is projected to reach USD 12.16 billion in 2025 and further expand to USD 24.23 billion by 2032, reflecting a CAGR of 10.35% during the forecast period. Europe led the global landscape with a 44.15% share in 2024, supported by robust R&D ecosystems and world-leading lithography equipment manufacturers.
EUV lithography is essential for enabling advanced semiconductor fabrication, particularly in producing chips with feature sizes below 7 nanometers. By using extreme ultraviolet light, the technology enables more precise patterning on silicon wafers, allowing manufacturers to increase transistor density and extend Moore's Law. EUV tools are critical in producing processors, memory chips, and ultra-fast electronics used in AI systems, 5G infrastructure, data centers, and high-performance consumer devices.
Impact of Generative AI
Generative AI is transforming semiconductor manufacturing processes by optimizing pattern layouts, enhancing simulation accuracy, and improving defect detection. EUV lithography benefits significantly from AI-assisted modeling, which reduces manufacturing variability, shortens production cycles, and increases wafer yield rates. As semiconductor companies adopt advanced AI-driven automation, the integration of AI into lithography pattern design will continue to accelerate market expansion.
Market Drivers
The primary driver of EUV lithography adoption is the increasing complexity of integrated circuits. Advanced processors and memory architectures demand ultra-fine geometries and higher transistor densities, which are only achievable through EUV lithography. Growing investment in 5nm, 3nm, and emerging sub-3nm nodes places EUV at the center of semiconductor innovation.
Furthermore, the expansion of data centers, cloud computing, and high-performance computing intensifies demand for next-generation memory devices such as NAND Flash and DRAM. EUV enables the precision and scalability required for advanced memory structures. Strategic collaborations-such as TSMC's partnership with ASML to expand EUV capacity-highlight the ongoing shift toward EUV-enabled mass production.
Market Restraints
Despite its advantages, EUV lithography faces major barriers. The equipment is extremely expensive, costing several times more than conventional lithography tools. EUV components-including masks, pellicles, and high-energy light sources-are highly complex and costly to manufacture. Smaller foundries face financial limitations in adopting EUV technology, and global shortages of specialized components have caused installation bottlenecks.
Additionally, challenges in mask integrity, pellicle durability, and achieving defect-free patterns continue to slow full-scale adoption, although industry innovations are gradually resolving these issues.
Market Opportunities
Expanding global investment in semiconductor fabrication and the rapid growth of data centers provide significant opportunities for EUV lithography systems. As consumer electronics, automotive electronics, and AI-enabled devices require powerful and energy-efficient chips, EUV lithography becomes indispensable for manufacturing advanced nodes. Increasing R&D funding for next-generation High-NA EUV technology will further enhance pattern accuracy and enable even smaller geometries, strengthening long-term market prospects.
Segmentation Overview
By Equipment Type
The light source segment held the largest share in 2024 at 42.12%, driven by innovations in high-power EUV generation systems. Masks are expected to register the fastest growth due to rising demand for high-precision semiconductor patterns and sub-7nm structures.
By End-User
Integrated Device Manufacturers (IDMs) dominated the market in 2024, leveraging EUV to deliver high-density, high-performance chips. IDMs are projected to hold 55.77% of the market in 2025. Foundries will exhibit the highest CAGR of 12.27%, as leading players increasingly transition to EUV for commercial chip production.
Regional Insights
Europe - Market Leader
Europe led global demand with a valuation of USD 4.94 billion in 2024. The region benefits from strong semiconductor R&D ecosystems and major investments such as Intel's multi-billion-dollar chip manufacturing projects in Germany and Poland.
Asia Pacific
Asia Pacific is the fastest-growing region, expected to reach USD 3.40 billion in 2025, driven by TSMC, Samsung, and SMIC's extensive EUV deployments.
North America
North America is projected to reach USD 1.80 billion in 2025, supported by rising demand for AI chips and advanced computing technologies.
Competitive Landscape
ASML remains the exclusive producer of EUV systems globally, giving it a dominant position in the market. Other major players-Samsung, Canon, KLA, Nikon, ZEISS, and Advantest-play critical roles in optics, metrology, and inspection systems. Continuous product innovations, strategic alliances, and High-NA EUV developments will define the competitive landscape through 2032.
Segmentation By Equipment
- Light Source
- Optics
- Mask
- Others (Mirror, etc.)
By End-user
- Integrated Device Manufacturer
- Foundries
By Region
- North America (By Equipment, End-user, and Country)
- U.S.
- Canada
- Mexico
- South America (By Equipment, End-user, and Country)
- Brazil
- Argentina
- Rest of South America
- Europe (By Equipment, End-user, and Country)
- Germany
- France
- Italy
- Spain
- Russia
- Benelux
- Nordics
- Rest of Europe
- Middle East & Africa (By Equipment, End-user, and Country)
- Turkey
- Israel
- GCC
- South Africa
- North Africa
- Rest of the Middle East & Africa
- Asia Pacific (By Equipment, End-user, and Country)
- China
- India
- Japan
- South Korea
- ASEAN
- Oceania
- Rest of Asia Pacific
Companies Profiled in the Report ASML (Netherlands), Samsung Electronics Co. Ltd. (South Korea), Canon Inc. (Japan), KLA Corporation (U.S.), NTT Advanced Technology Corporation (Japan), Nikon Corporation (China), ZEISS Group (Germany), ADVANTEST CORPORATION (Japan), SUSS MicroTec SE (Germany)
Table of Content
1. Introduction
- 1.1. Definition, By Segment
- 1.2. Research Methodology/Approach
- 1.3. Data Sources
2. Executive Summary
3. Market Dynamics
- 3.1. Macro and Micro Economic Indicators
- 3.2. Drivers, Restraints, Opportunities and Trends
- 3.3. Impact of Generative AI
4. Competition Landscape
- 4.1. Business Strategies Adopted by Key Players
- 4.2. Consolidated SWOT Analysis of Key Players
- 4.3. Global EUV Lithography Key Players (Top 3 - 5) Market Share/Ranking, 2024
5. Global EUV Lithography Market Size Estimates and Forecasts, By Segments, 2019-2032
- 5.1. Key Findings
- 5.2. By Equipment (USD)
- 5.2.1. Light Source
- 5.2.2. Optics
- 5.2.3. Mask
- 5.2.4. Others (Mirror, etc.)
- 5.3. By End-user (USD)
- 5.3.1. Integrated Device Manufacturer
- 5.3.2. Foundries
- 5.4. By Region (USD)
- 5.4.1. North America
- 5.4.2. South America
- 5.4.3. Europe
- 5.4.4. Middle East & Africa
- 5.4.5. Asia Pacific
6. North America EUV Lithography Market Size Estimates and Forecasts, By Segments, 2019-2032
- 6.1. Key Findings
- 6.2. By Equipment (USD)
- 6.2.1. Light Source
- 6.2.2. Optics
- 6.2.3. Mask
- 6.2.4. Others (Mirror, etc.)
- 6.3. By End-user (USD)
- 6.3.1. Integrated Device Manufacturer
- 6.3.2. Foundries
- 6.4. By Country (USD)
- 6.4.1. United States
- 6.4.2. Canada
- 6.4.3. Mexico
7. South America EUV Lithography Market Size Estimates and Forecasts, By Segments, 2019-2032
- 7.1. Key Findings
- 7.2. By Equipment (USD)
- 7.2.1. Light Source
- 7.2.2. Optics
- 7.2.3. Mask
- 7.2.4. Others (Mirror, etc.)
- 7.3. By End-user (USD)
- 7.3.1. Integrated Device Manufacturer
- 7.3.2. Foundries
- 7.4. By Country (USD)
- 7.4.1. Brazil
- 7.4.2. Argentina
- 7.4.3. Rest of South America
8. Europe EUV Lithography Market Size Estimates and Forecasts, By Segments, 2019-2032
- 8.1. Key Findings
- 8.2. By Equipment (USD)
- 8.2.1. Light Source
- 8.2.2. Optics
- 8.2.3. Mask
- 8.2.4. Others (Mirror, etc.)
- 8.3. By End-user (USD)
- 8.3.1. Integrated Device Manufacturer
- 8.3.2. Foundries
- 8.4. By Country (USD)
- 8.4.1. United Kingdom
- 8.4.2. Germany
- 8.4.3. France
- 8.4.4. Italy
- 8.4.5. Spain
- 8.4.6. Russia
- 8.4.7. Benelux
- 8.4.8. Nordics
- 8.4.9. Rest of Europe
9. Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Segments, 2019-2032
- 9.1. Key Findings
- 9.2. By Equipment (USD)
- 9.2.1. Light Source
- 9.2.2. Optics
- 9.2.3. Mask
- 9.2.4. Others (Mirror, etc.)
- 9.3. By End-user (USD)
- 9.3.1. Integrated Device Manufacturer
- 9.3.2. Foundries
- 9.4. By Country (USD)
- 9.4.1. Turkey
- 9.4.2. Israel
- 9.4.3. GCC
- 9.4.4. North Africa
- 9.4.5. South Africa
- 9.4.6. Rest of MEA
10. Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Segments, 2019-2032
- 10.1. Key Findings
- 10.2. By Equipment (USD)
- 10.2.1. Light Source
- 10.2.2. Optics
- 10.2.3. Mask
- 10.2.4. Others (Mirror, etc.)
- 10.3. By End-user (USD)
- 10.3.1. Integrated Device Manufacturer
- 10.3.2. Foundries
- 10.4. By Country (USD)
- 10.4.1. China
- 10.4.2. India
- 10.4.3. Japan
- 10.4.4. South Korea
- 10.4.5. ASEAN
- 10.4.6. Oceania
- 10.4.7. Rest of Asia Pacific
11. Company Profiles for Top 10 Players (Based on data availability in public domain and/or on paid databases)
- 11.1. ASML
- 11.1.1. Overview
- 11.1.1.1. Key Management
- 11.1.1.2. Headquarters
- 11.1.1.3. Offerings/Business Segments
- 11.1.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.1.2.1. Employee Size
- 11.1.2.2. Past and Current Revenue
- 11.1.2.3. Geographical Share
- 11.1.2.4. Business Segment Share
- 11.1.2.5. Recent Developments
- 11.1.1. Overview
- 11.2. Samsung Groups Co. Ltd.
- 11.2.1. Overview
- 11.2.1.1. Key Management
- 11.2.1.2. Headquarters
- 11.2.1.3. Offerings/Business Segments
- 11.2.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.2.2.1. Employee Size
- 11.2.2.2. Past and Current Revenue
- 11.2.2.3. Geographical Share
- 11.2.2.4. Business Segment Share
- 11.2.2.5. Recent Developments
- 11.2.1. Overview
- 11.3. Canon Inc.
- 11.3.1. Overview
- 11.3.1.1. Key Management
- 11.3.1.2. Headquarters
- 11.3.1.3. Offerings/Business Segments
- 11.3.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.3.2.1. Employee Size
- 11.3.2.2. Past and Current Revenue
- 11.3.2.3. Geographical Share
- 11.3.2.4. Business Segment Share
- 11.3.2.5. Recent Developments
- 11.3.1. Overview
- 11.4. NTT Advanced Technology Corporation
- 11.4.1. Overview
- 11.4.1.1. Key Management
- 11.4.1.2. Headquarters
- 11.4.1.3. Offerings/Business Segments
- 11.4.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.4.2.1. Employee Size
- 11.4.2.2. Past and Current Revenue
- 11.4.2.3. Geographical Share
- 11.4.2.4. Business Segment Share
- 11.4.2.5. Recent Developments
- 11.4.1. Overview
- 11.5. Nikon Corporation
- 11.5.1. Overview
- 11.5.1.1. Key Management
- 11.5.1.2. Headquarters
- 11.5.1.3. Offerings/Business Segments
- 11.5.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.5.2.1. Employee Size
- 11.5.2.2. Past and Current Revenue
- 11.5.2.3. Geographical Share
- 11.5.2.4. Business Segment Share
- 11.5.2.5. Recent Developments
- 11.5.1. Overview
- 11.6. KLA Corporation
- 11.6.1. Overview
- 11.6.1.1. Key Management
- 11.6.1.2. Headquarters
- 11.6.1.3. Offerings/Business Segments
- 11.6.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.6.2.1. Employee Size
- 11.6.2.2. Past and Current Revenue
- 11.6.2.3. Geographical Share
- 11.6.2.4. Business Segment Share
- 11.6.2.5. Recent Developments
- 11.6.1. Overview
- 11.7. ADVANTEST CORPORATION
- 11.7.1. Overview
- 11.7.1.1. Key Management
- 11.7.1.2. Headquarters
- 11.7.1.3. Offerings/Business Segments
- 11.7.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.7.2.1. Employee Size
- 11.7.2.2. Past and Current Revenue
- 11.7.2.3. Geographical Share
- 11.7.2.4. Business Segment Share
- 11.7.2.5. Recent Developments
- 11.7.1. Overview
- 11.8. Ushio Inc.
- 11.8.1. Overview
- 11.8.1.1. Key Management
- 11.8.1.2. Headquarters
- 11.8.1.3. Offerings/Business Segments
- 11.8.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.8.2.1. Employee Size
- 11.8.2.2. Past and Current Revenue
- 11.8.2.3. Geographical Share
- 11.8.2.4. Business Segment Share
- 11.8.2.5. Recent Developments
- 11.8.1. Overview
- 11.9. TOPPAN PHOTOMASKS
- 11.9.1. Overview
- 11.9.1.1. Key Management
- 11.9.1.2. Headquarters
- 11.9.1.3. Offerings/Business Segments
- 11.9.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.9.2.1. Employee Size
- 11.9.2.2. Past and Current Revenue
- 11.9.2.3. Geographical Share
- 11.9.2.4. Business Segment Share
- 11.9.2.5. Recent Developments
- 11.9.1. Overview
- 11.10. SUSS MicroTec SE
- 11.10.1. Overview
- 11.10.1.1. Key Management
- 11.10.1.2. Headquarters
- 11.10.1.3. Offerings/Business Segments
- 11.10.2. Key Details (Key details are consolidated data and not product/service specific)
- 11.10.2.1. Employee Size
- 11.10.2.2. Past and Current Revenue
- 11.10.2.3. Geographical Share
- 11.10.2.4. Business Segment Share
- 11.10.2.5. Recent Developments
- 11.10.1. Overview
12. Key Takeaways
List of Tables
- Table 1: Global EUV Lithography Market Size Estimates and Forecasts, 2019 - 2032
- Table 2: Global EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2019 - 2032
- Table 3: Global EUV Lithography Market Size Estimates and Forecasts, By End-user, 2019 - 2032
- Table 4: Global EUV Lithography Market Size Estimates and Forecasts, By Region, 2019 - 2032
- Table 5: North America EUV Lithography Market Size Estimates and Forecasts, 2019 - 2032
- Table 6: North America EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2019 - 2032
- Table 7: North America EUV Lithography Market Size Estimates and Forecasts, By End-user, 2019 - 2032
- Table 8: North America EUV Lithography Market Size Estimates and Forecasts, By Country, 2019 - 2032
- Table 9: South America EUV Lithography Market Size Estimates and Forecasts, 2019 - 2032
- Table 10: South America EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2019 - 2032
- Table 11: South America EUV Lithography Market Size Estimates and Forecasts, By End-user, 2019 - 2032
- Table 12: South America EUV Lithography Market Size Estimates and Forecasts, By Country, 2019 - 2032
- Table 13: Europe EUV Lithography Market Size Estimates and Forecasts, 2019 - 2032
- Table 14: Europe EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2019 - 2032
- Table 15: Europe EUV Lithography Market Size Estimates and Forecasts, By End-user, 2019 - 2032
- Table 16: Europe EUV Lithography Market Size Estimates and Forecasts, By Country, 2019 - 2032
- Table 17: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, 2019 - 2032
- Table 18: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2019 - 2032
- Table 19: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By End-user, 2019 - 2032
- Table 20: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Country, 2019 - 2032
- Table 21: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, 2019 - 2032
- Table 22: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2019 - 2032
- Table 23: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By End-user, 2019 - 2032
- Table 24: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Country, 2019 - 2032
List of Figures
- Figure 1: Global EUV Lithography Market Revenue Share (%), 2025 and 2032
- Figure 2: Global EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2032
- Figure 3: Global EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2032
- Figure 4: Global EUV Lithography Market Revenue Share (%), By Region, 2025 and 2032
- Figure 5: North America EUV Lithography Market Revenue Share (%), 2025 and 2032
- Figure 6: North America EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2032
- Figure 7: North America EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2032
- Figure 8: North America EUV Lithography Market Revenue Share (%), By Country, 2025 and 2032
- Figure 9: South America EUV Lithography Market Revenue Share (%), 2025 and 2032
- Figure 10: South America EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2032
- Figure 11: South America EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2032
- Figure 12: South America EUV Lithography Market Revenue Share (%), By Country, 2025 and 2032
- Figure 13: Europe EUV Lithography Market Revenue Share (%), 2025 and 2032
- Figure 14: Europe EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2032
- Figure 15: Europe EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2032
- Figure 16: Europe EUV Lithography Market Revenue Share (%), By Country, 2025 and 2032
- Figure 17: Middle East & Africa EUV Lithography Market Revenue Share (%), 2025 and 2032
- Figure 18: Middle East & Africa EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2032
- Figure 19: Middle East & Africa EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2032
- Figure 20: Middle East & Africa EUV Lithography Market Revenue Share (%), By Country, 2025 and 2032
- Figure 21: Asia Pacific EUV Lithography Market Revenue Share (%), 2025 and 2032
- Figure 22: Asia Pacific EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2032
- Figure 23: Asia Pacific EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2032
- Figure 24: Asia Pacific EUV Lithography Market Revenue Share (%), By Country, 2025 and 2032
- Figure 25: Global EUV Lithography Key Players' Market Share/Ranking (%), 2024
